OUR FACILITY

Table-top Scanning
Electron Microscopy (SEM)

Brand
COXEM (Korea)

Model
EM30+ (AX)

Max. Magnification
up to 150,000x

Accelerating Voltage
1 kV to 30 kV (adjustable at 1 kV increments)

Aperture (e-beam spot size)
Variable 30/50/100/200 µm

Detector signals
SE / BSE / SE+BSE

Energy Dispersive
X-Ray Spectroscope (EDS)

Brand
Oxford Instruments (UK)

Model
XploreCompact 30

Chemical mapping / imaging

Sensor size
30 mm2

Detection range
B(5) to Cf(98)

Ion Sputter
Coater

Brand
COXEM (Korea)

Model
SPT-20

Sample coating

Coating materials
Gold